Undergraduate Courses:

• ME201 Materials Science
• ME203 Materials Lab

Graduate Courses:

• ME635 Finite Element Analysis
• ME695: Design and Modeling of MEMS Devices

ME 695 Course Description:

MicroElectroMechanical Systems (MEMS) devices are the integration of mechanical elements and transducers on a common silicon substrate through expanded IC technology. MEMS devices have found a variety of applications, such as projection display, accelerometers, gyroscopes, electrical filters, biological/chemical sensors, and health care.  From both mechanical aspect and electrical aspect, this multidisciplinary course focuses on the design and modeling of MEMS devices for the applications of inertial sensing, biological/chemical sensing, and wireless communications. Through a combination of lectures, case studies, individual homework assignments, and design projects carried out in teams, students will learn the in-depth knowledge and skills about developing various MEMS devices.

Textbook: Zhili Hao “Design and Modeling of Micromechanical Resonant Devices,” Springer, ISBN: 978-0-387-46279-0, February 2009.